Unfortunately, these images are significantly underutilized. SEM Review images, for example, are assigned a class code either by SEM ADC software or by a human operator. But these images contain a lot more information that is neither extracted nor used. The rich information content of images is reduced to a mere class code.
D2DB-Image Explorer is a set of functions (a toolkit) that allow customers to extract the rich information content of images and integrate that information into their own custom workflows (or batch jobs).
Two light-weight GUIs are also provided, allowing users to experiment with the various features and settings, and to review results.
D2DB-Image Explorer is an off-tool and vendor-neutral solution, which means it can be installed on the user’s hardware to process images from any SEM and E-Beam tool. It allows users to maximize their return on investment from high resolution imaging tools, and to build unique solutions for their unique problems.
(Note that successful image processing depends on the pixel size, number of pixels (FOV), and overall image quality. Image Explorer compensates for many image artifacts, but it cannot compensate for severe image quality issues.)
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Annotation and Markup Removal
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• Hard Open (or break) or Partial Open (necking).
• Hard Short (or bridge) or Partial Short.
• Line End Pullback with and without via coverage check.
- Set of Linux functions that provide leading-edge image processing capabilities.
- Customers can embed these capabilities into their own automation workflows.
- Vendor-neutral: D2DB-Image Explorer works with images from multiple SEM and E-Beam tool brands.
- Annotation and Markup Removal to clean images.
- Contour Extraction with Automatic or Manual Parameter Setup.
- Contour Alignment for offset correction (aligning contour to design within a small offset distance to compensate for inspection tool coordinate error).
- Contour Search to search the entire design or any region of the design for all occurrences of the contour.
- Defect Detection to find opens, partial-opens (necking), shorts, partial shorts, and line-end pullbacks.
With feature sizes well below 28nm, a coordinate error of 100+ nm is excessive, and it imposes significant restrictions on the types of use cases that can be achieved.
But integrating high resolution images with the design allows us to pinpoint the defect on the design and thus identify the actual impacted polygons, as shown in the figure above.
Once the actual impacted polygons have been identified, a number of new possibilities open up!
- Linux 2.6 or later, 64-bit, x86 based processor.
- 16 or more physical cores.
- 128 GB or more physical memory.
- 2 TB or more available hard drive capacity.
Memory and hard drive requirements can vary substantially from customer to customer. Customers who expect to store large quantities of images on the server should allocate appropriate hard drive capacity. Customers who expect to process large numbers of images should allocate additional physical memory. Anchor Semiconductor will help each customer with the appropriate sizing of their hardware.